• Ørsteds Plads, 347

    DK-2800 Kongens Lyngby

    Denmark

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Research Output

Deep reactive ion etching of ‘grass-free’ widely-spaced periodic 2D arrays, using sacrificial structures

Silvestre, C. M., Nguyen, V. T. H., Jansen, H. & Hansen, O., 2020, In : Microelectronic Engineering. 223, 11 p., 111228.

Research output: Contribution to journalJournal articleResearchpeer-review

Electron-Beam Patterning of Vapor-Deposited Solid Anisole

Zhao, D., Chang, B. & Beleggia, M., 2020, In : ACS Applied Materials and Interfaces. 12, 5, p. 6436-6441

Research output: Contribution to journalJournal articleResearchpeer-review