Talk about "Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures" at INSIGHT 2009

Petersen, D. H. (Speaker)

    Activity: Talks and presentationsConference presentations

    Period30 May 2009
    Event titleInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling
    Event typeWorkshop
    LocationNapa Valley, United States, California