Pyrolytic carbon for MEMS string resonantors

Activity: Talks and presentationsConference presentations

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Quang Long Nguyen - Speaker

Peter Emil Larsen - Other

Anja Boisen - Other

Stephan Sylvest Keller - Invited speaker

C-MEMS 2018 oral presentation
11 Jun 2018

Event (Conference)

TitleInternational Conference on Expanding Frontiers of Carbon MEMS
Abbreviated titleC-MEMS 2018
Date10/06/201812/06/2018
Website
LocationSan Diego State University
CitySan Diego
CountryUnited States
Degree of recognitionInternational event

    Keywords

  • C-MEMS, pyrolytic carbon, MEMS, Resonators
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