Pyrolytic carbon for MEMS string resonantors

    Activity: Talks and presentations › Conference presentations

    Description

    C-MEMS 2018 oral presentation
    Period11 Jun 2018
    Event titleInternational Conference on Expanding Frontiers of Carbon MEMS
    Event typeConference
    LocationSan Diego, United States, CaliforniaShow on map
    Degree of RecognitionInternational

    Keywords

    • C-MEMS
    • pyrolytic carbon
    • MEMS
    • Resonators

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