Pyrolytic carbon for MEMS string resonantors

Nguyen, Q. L. (Speaker), Peter Emil Larsen (Other), Boisen, A. (Other), Keller, S. S. (Invited speaker)

Activity: Talks and presentationsConference presentations

Description

C-MEMS 2018 oral presentation
Period11 Jun 2018
Event titleInternational Conference on Expanding Frontiers of Carbon MEMS
Event typeConference
LocationSan Diego, United States, California
Degree of RecognitionInternational

Keywords

  • C-MEMS
  • pyrolytic carbon
  • MEMS
  • Resonators