Electron-beam patterning organic ice resists

Elsukova, A. (Other), William Tiddi (Other), Han, A. (Other), Beleggia, M. (Other)

Activity: Talks and presentationsConference presentations

Description

The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication, Puerto Rico, United States
Period29 May 2018 - 1 Jun 2018
Held atThe 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication
Event typeConference
LocationPuerto Rico, United States
Degree of RecognitionInternational