DTU Energy Conversion 2nd International PhD Summer School

Bowen, J. R. (Participant)

Activity: Other


The focused ion beam scanning electron microscope (FIB-SEM) is a versatile microscope that can be used for a wide range of applications including site specific transmission electron microscope (TEM) sample preparation, ion beam lithography, micro machining, integrated circuit edits, cross-sectioning and for serial sectioning to generate high resolution three dimensional images of microstructure.In the past decade the FIB-SEM has enabled many critical investigations of electrode microstructure to be performed. Electrodes tend to be made from heterogeneous stochastic porous composite materials that often have important nanoscale microstructure features. Making TEM samples to reveal critical local information from active sites within these electrodes is challenging. The FIB-SEM’s ability to make site specific samples regardless of material composition and hardness has been a major breakthrough for these devices. The FIB-SEM has also opened the door to nanometer resolution 3D imaging of electrode microstructures and provided access to for the first time microstructure parameters of electrodes only obtainable from 3D data.This talk will cover ion beam and FIB column basics, interactions of ions with materials for producing images and sputtering, ion and electron beam induced chemical vapour deposition, advantages and disadvantages of TEM sample preparation, practical aspects of serial sectioning for SEM imaging and electron backscatter diffraction (EBSD) from the users point of view. A series of examples of TEM sample preparation, 3D reconstructions and 3DEBSD on a range of energy materials will be presented as well as the range of information that can be extracted from 3D reconstructions of electrodes.

The Focused Ion Beam – Scanning Electron Microscope: A tool for sample preparation, two and three dimensional imaging

Course lecturer
Period29 Aug 2014
Event titleDTU Energy Conversion 2nd International PhD Summer School: IMAGINE: Methods in Imaging of Energy Material Microstructure
Event typeCourse
Conference number2
LocationHundested, Denmark


  • Focused ion beam
  • Scanning Electron Microscopy