5-nm-lines in Organic Ice Resists

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Anna Elsukova - Other

Anpan Han - Other

Marco Beleggia - Other

44th International conference on Micro and Nano Engineering, Copenhagen, Denmark
24 Sep 201827 Sep 2018

Event (Conference)

Title44th International conference on Micro and Nano Engineering
Abbreviated titleMNE 2018
Date24/09/201827/09/2018
Website
CityCopenhagen
CountryDenmark
Degree of recognitionInternational event
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