5-nm-lines in Organic Ice Resists

Anna Elsukova (Other), Han, A. (Other), Beleggia, M. (Other)

Activity: Talks and presentationsConference presentations

Description

44th International conference on Micro and Nano Engineering, Copenhagen, Denmark
Period24 Sep 201827 Sep 2018
Event title44th International conference on Micro and Nano Engineering: null
Event typeConference
Conference number44
LocationCopenhagen, Denmark