5-nm-lines in Organic Ice Resists

Elsukova, A. (Other), Han, A. (Other), Beleggia, M. (Other)

Activity: Talks and presentationsConference presentations

Description

44th International conference on Micro and Nano Engineering, Copenhagen, Denmark
Period24 Sep 2018 - 27 Sep 2018
Held at44th International conference on Micro and Nano Engineering
Event typeConference
Conference number44
LocationCopenhagen, Denmark