5-nm-lines in Organic Ice Resists

Anna Elsukova (Other), Han, A. (Other), Beleggia, M. (Other)

Activity: Talks and presentationsConference presentations

Description

44th International conference on Micro and Nano Engineering, Copenhagen, Denmark
Period24 Sep 201827 Sep 2018
Event title44th International conference on Micro and Nano Engineering
Event typeConference
Conference number44
LocationCopenhagen, Denmark