39th International Conference on Micro and Nano Engineering

  • Kristian Hagsted Rasmussen (Participant)

    Activity: Attending an eventParticipating in or organising a conference

    Description

    Dry etching of TOPAS® in oxygen based plasma, Kristian Hagsted Rasmussen, Ole Hansen, Flemming Jensen, Stephan S. Keller, and Anders M. Jorgensen
    Period16 Sept 201319 Sept 2013
    Event typeConference
    Conference number39th
    LocationLondon, United KingdomShow on map