39th International Conference on Micro and Nano Engineering

  • Kristian Hagsted Rasmussen (Participant)

    Activity: Attending an eventParticipating in or organising a conference

    Description

    Dry etching of TOPAS® in oxygen based plasma, Kristian Hagsted Rasmussen, Ole Hansen, Flemming Jensen, Stephan S. Keller, and Anders M. Jorgensen
    Period16 Sep 201319 Sep 2013
    Event typeConference
    Conference number39th
    LocationLondon, United Kingdom