17th International Conference on Advanced Thermal Processing of Semiconductors RTP09

  • Dirch Hjorth Petersen (Participant)

    Activity: Attending an eventParticipating in or organising a conference


    Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology
    Period29 Sept 20092 Oct 2009
    Event typeConference
    Conference number17
    LocationAlbany, United States, New YorkShow on map