17th International Conference on Advanced Thermal Processing of Semiconductors RTP09

Petersen, D. H. (Participant)

    Activity: Attending an eventParticipating in or organising a conference

    Description

    Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology
    Period29 Sep 20092 Oct 2009
    Event typeConference
    Conference number17
    LocationAlbany, United States, New York