17th International Conference on Advanced Thermal Processing of Semiconductors RTP09

  • Dirch Hjorth Petersen (Participant)

    Activity: Attending an event › Participating in or organising a conference

    Description

    Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology
    Period29 Sept 2009 → 2 Oct 2009
    Event typeConference
    Conference number17
    LocationAlbany, United States, New YorkShow on map