Fabrication of Cantilevers by NIL. / Greve, Anders; Keller, Stephan Urs; Larsson, David; Kristensen, Anders; Yvind, Kresten; Hvam, Jørn Märcher; Boisen, Anja.

In: In proceeding of "International Workshop on Nanomechanical Cantilever Sensors". Max Planck Institute for Polymer Research, 2008.

Publication: Research - peer-review › Article in proceedings – Annual report year: 2008