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Wafer scale imprint uniformity evaluated by LSPR spectroscopy: a high volume characterization method for nanometer scale structures : Paper. / Jeppesen, Claus; Lindstedt, Daniel Nilsson; Vig, Asger Laurberg; Kristensen, Anders; Mortensen, N. Asger.

In: Nanotechnology, Vol. 23, No. 38, 2012, p. 385306.

Publication: Research - peer-reviewJournal article – Annual report year: 2012

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Jeppesen, Claus; Lindstedt, Daniel Nilsson; Vig, Asger Laurberg; Kristensen, Anders; Mortensen, N. Asger / Wafer scale imprint uniformity evaluated by LSPR spectroscopy: a high volume characterization method for nanometer scale structures : Paper.

In: Nanotechnology, Vol. 23, No. 38, 2012, p. 385306.

Publication: Research - peer-reviewJournal article – Annual report year: 2012

Bibtex

@article{d50c113c8bad4a38ae7613c638a8b135,
title = "Wafer scale imprint uniformity evaluated by LSPR spectroscopy: a high volume characterization method for nanometer scale structures: Paper",
publisher = "Institute of Physics Publishing",
author = "Claus Jeppesen and Lindstedt, {Daniel Nilsson} and Vig, {Asger Laurberg} and Anders Kristensen and Mortensen, {N. Asger}",
year = "2012",
doi = "10.1088/0957-4484/23/38/385306",
volume = "23",
number = "38",
pages = "385306",
journal = "Nanotechnology",
issn = "0957-4484",

}

RIS

TY - JOUR

T1 - Wafer scale imprint uniformity evaluated by LSPR spectroscopy: a high volume characterization method for nanometer scale structures

T2 - Paper

A1 - Jeppesen,Claus

A1 - Lindstedt,Daniel Nilsson

A1 - Vig,Asger Laurberg

A1 - Kristensen,Anders

A1 - Mortensen,N. Asger

AU - Jeppesen,Claus

AU - Lindstedt,Daniel Nilsson

AU - Vig,Asger Laurberg

AU - Kristensen,Anders

AU - Mortensen,N. Asger

PB - Institute of Physics Publishing

PY - 2012

Y1 - 2012

N2 - We exploit the localized surface-plasmon resonance (LSPR) of terahertz gold gammadion structures for wafer scale critical dimension metrology of nanostructures. The proposed characterization method, LSPR spectroscopy, is based on optical transmission measurements and is benchmarked against numerical simulations of imprinted structures characterized by atomic force microscopy. There is a fair agreement between the two methods and the simulations enable the translation of optical spectra to critical dimensions of the physical structures, a concept known from scatterometry. The results demonstrate the potential of LSPR spectroscopy as an alternative characterization method to scanning electron microscopy, atomic force microscopy and scatterometry.

AB - We exploit the localized surface-plasmon resonance (LSPR) of terahertz gold gammadion structures for wafer scale critical dimension metrology of nanostructures. The proposed characterization method, LSPR spectroscopy, is based on optical transmission measurements and is benchmarked against numerical simulations of imprinted structures characterized by atomic force microscopy. There is a fair agreement between the two methods and the simulations enable the translation of optical spectra to critical dimensions of the physical structures, a concept known from scatterometry. The results demonstrate the potential of LSPR spectroscopy as an alternative characterization method to scanning electron microscopy, atomic force microscopy and scatterometry.

U2 - 10.1088/0957-4484/23/38/385306

DO - 10.1088/0957-4484/23/38/385306

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 38

VL - 23

SP - 385306

ER -