Visualization of the sheath-lens focusing effect to disk and square electrodes

Publication: Research - peer-reviewJournal article – Annual report year: 2005

Without internal affiliation

  • Author: Stamate, Eugen

    Unknown

  • Author: Sugai, H.

    Department of Electrical Engineering and Computer Science, Nagoya University, Japan

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The property of the sheath evolving to one-side biased electrodes to focus in a discrete manner the positive ions to distinct regions on the surface is demonstrated both theoretically and experimentally. Positive ion trajectories to disk and square electrodes are obtained by solving in three dimensions the Poisson equation. The related ion flux is found to be in excellent agreement with the experimental ion flux developed by exposing the electrodes in Ar plasma.
Original languageEnglish
JournalI E E E Transactions on Plasma Science
Publication date2005
Volume33
Issue2
Pages534-535
ISSN0093-3813
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 2
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