Vertical sidewall roughness measured by AFM and SEM

Publication: Research - peer-reviewConference article – Annual report year: 2011

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Original languageEnglish
JournalMeasurement Science and Technology
Publication date2011
ISSN0957-0233
StatePublished

Conference

ConferenceNanoScale : 9th Seminar on Quantitative Microscopy (QM) and 5th Seminar on Nanoscale Calibration Standards and Methods
CityBrno, Czech Republic
Period01/01/10 → …
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