Vertical sidewall roughness measured by AFM and SEM
Publication: Research - peer-review › Conference article – Annual report year: 2011
| Original language | English |
|---|---|
| Journal | Measurement Science and Technology |
| Publication date | 2011 |
| ISSN | 0957-0233 |
| State | Published |
Conference
| Conference | NanoScale : 9th Seminar on Quantitative Microscopy (QM) and 5th Seminar on Nanoscale Calibration Standards and Methods |
|---|---|
| City | Brno, Czech Republic |
| Period | 01-01-10 → … |
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ID: 5520933