Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS

Publication: Research - peer-reviewJournal article – Annual report year: 2007

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Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS. / Zhuang, Yanxin; Hansen, Ole; Knieling, Thomas; Wang, Christian; Rombach, Pirmin; Lang, Walter; Benecke, Wolfgang; Kehlenbeck, Markus; Koblitz, Jörn.

In: I E E E Journal of Microelectromechanical Systems, Vol. 16, No. 6, 2007, p. 1451-1460.

Publication: Research - peer-reviewJournal article – Annual report year: 2007

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Zhuang, Yanxin; Hansen, Ole; Knieling, Thomas; Wang, Christian; Rombach, Pirmin; Lang, Walter; Benecke, Wolfgang; Kehlenbeck, Markus; Koblitz, Jörn / Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS.

In: I E E E Journal of Microelectromechanical Systems, Vol. 16, No. 6, 2007, p. 1451-1460.

Publication: Research - peer-reviewJournal article – Annual report year: 2007

Bibtex

@article{2a4df17b3a2747b7a14b440c9490c651,
title = "Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS",
publisher = "I E E E",
author = "Yanxin Zhuang and Ole Hansen and Thomas Knieling and Christian Wang and Pirmin Rombach and Walter Lang and Wolfgang Benecke and Markus Kehlenbeck and Jörn Koblitz",
note = "Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE",
year = "2007",
doi = "10.1109/JMEMS.2007.904342",
volume = "16",
number = "6",
pages = "1451--1460",
journal = "I E E E Journal of Microelectromechanical Systems",
issn = "1057-7157",

}

RIS

TY - JOUR

T1 - Vapor Phase Self-assembled Monolayers for Anti-stiction Applications in MEMS

A1 - Zhuang,Yanxin

A1 - Hansen,Ole

A1 - Knieling,Thomas

A1 - Wang,Christian

A1 - Rombach,Pirmin

A1 - Lang,Walter

A1 - Benecke,Wolfgang

A1 - Kehlenbeck,Markus

A1 - Koblitz,Jörn

AU - Zhuang,Yanxin

AU - Hansen,Ole

AU - Knieling,Thomas

AU - Wang,Christian

AU - Rombach,Pirmin

AU - Lang,Walter

AU - Benecke,Wolfgang

AU - Kehlenbeck,Markus

AU - Koblitz,Jörn

PB - I E E E

PY - 2007

Y1 - 2007

N2 - We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.

AB - We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.

U2 - 10.1109/JMEMS.2007.904342

DO - 10.1109/JMEMS.2007.904342

JO - I E E E Journal of Microelectromechanical Systems

JF - I E E E Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 6

VL - 16

SP - 1451

EP - 1460

ER -