Use of self-assembled peptide nanostructures for the fabrication of silicon nanowires

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2011

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1. INTRODUCTION Self-assembled diphenylalanine peptide nanotubes provide a means of achieving nanostructured materials in a very simple and fast way. Recent discoveries have shown that this unique material, in addition to remaining stable under dry conditions, rapidly dissolves in water making it a promising candidate for controlled nanofabrication without organic solvents [1]. The present work demonstrates how this unique structure can be used as both an etching mask in a dry etching procedure and as a lift-off material. As a further demonstration of the potential of this technique, the peptide nanotubes were utilized to fabricate silicon nanowire devices and gold nanoslits. 2. RESULTS Silicon nanowire devices were fabricated from a silicon-on-isolator (SOI) wafer, in this case with a device layer of 50 nm and a buried oxide layer of 380 nm. Metal electrodes were first patterned using standard photolithography, and after deposition of the electrodes, self-assembled peptide nanotubes (PNT), figure 1, were positioned on top of the electrodes. The silicon nanowires were then etched in a reactive ion etching process masked by the positioned peptide nanotubes. Finally, the peptide nanotubes were dissolved by placing the now processed wafers in a distilled water bath. Figure 2 shows a SEM image of a PNT positioned between two metal electrodes. The silicon nanowire fabricated in this experiment had a width on the order of 250 nm – well below the limitations of standard photolithography, figure 3. To verify if an electrical contact could be established between the metal electrodes and the silicon nanowires and I-V curve was measured. Figure 4 displays the electrical characterization of the silicon nanowire. The fabricated silicon nanowire was also decorated with functional compounds in order to probe their potential in the development of biosensing platforms. 3. SUMMARY This work has demonstrated how newly discovered properties of diphenylalnine PNTs make them excellent candidates as the next nanotechnology fabrication tool. It was demonstrated how the PNTs could be utilized for a low-cost and fast fabrication of silicon nanowires. Furthermore, the PNTs could be used as lift-off masks for the patterning during deposition of materials. REFERENCES [1] K. B. Andersen, J. Castillo-León, M. Hedstrom, W. E. Svendsen. Nanoscale. 3, 994-998, (2011)
Original languageEnglish
Title of host publicationUse of self-assembled peptide nanostructures for the fabrication of silicon nanowires
Publication date2011
Pages27P-11-67
StatePublished

Conference

ConferenceMNC 2011, 24th International Microprocesses and Nanotechnology Conference
CityKyoto, Japan
Period01/01/11 → …
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