Ultrasensitive bulk disk microresonator-based sensor for distributed mass sensing

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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In the framework of the development of an ultrasensitive microfabricated mass sensor for distributed mass sensing applications we present a bulk resonator-based mass sensor. The two devices presented are based on a polysilicon disk resonating at 132 and 66 MHz, respectively, actuated electrostatically in a wine-glass mode. By using bulk mode resonators it has been possible to reduce the thickness of the sensor layer without affecting the resonance frequency, reaching an extremely high distributed mass to a frequency shift sensitivity of 11.3 kHz mu m(2) fg(-1) and a markedly small mass resolution of 8.7 pg cm(-2) in air and at room temperature.
Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number4
Pages (from-to)045016
ISSN0960-1317
DOIs
StatePublished - 2011
Peer-reviewedYes
CitationsWeb of Science® Times Cited: 9

Keywords

  • Micromechanical devices and systems, Remote sensing
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