Triaxial MEMS accelerometer with screen printed PZT thick film
Publication: Research - peer-review › Journal article – Annual report year: 2010
Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10-100 mu m. In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen.
| Original language | English |
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| Journal | Journal of Electroceramics |
| Publication date | 2010 |
| Volume | 25 |
| Journal number | 2-4 |
| Pages | 108-115 |
| ISSN | 1385-3449 |
| DOIs | |
| State | Published |
| Citations | Web of Science® Times Cited: 2 |
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Keywords
- PZT thick film, Piezoelectric effect, MEMS device, Characterization, Triaxial accelerometer, Fabrication process flow, Screen printing
ID: 5147863