Triaxial MEMS accelerometer with screen printed PZT thick film

Publication: Research - peer-reviewJournal article – Annual report year: 2010

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Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10-100 mu m. In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen.
Original languageEnglish
JournalJournal of Electroceramics
Publication date2010
Volume25
Issue2-4
Pages108-115
ISSN1385-3449
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 5

Keywords

  • PZT thick film, Piezoelectric effect, MEMS device, Characterization, Triaxial accelerometer, Fabrication process flow, Screen printing
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