Towards easily reproducible nano-structured SERS substrates

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2009

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Towards easily reproducible nano-structured SERS substrates. / Schmidt, Michael Stenbæk; Boisen, Anja; Hübner, Jörg.

Sensors, 2009 IEEE. IEEE, 2009. p. 1763-1767.

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2009

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Schmidt, Michael Stenbæk; Boisen, Anja; Hübner, Jörg / Towards easily reproducible nano-structured SERS substrates.

Sensors, 2009 IEEE. IEEE, 2009. p. 1763-1767.

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2009

Bibtex

@inbook{af1c575d60ae49df8ea51a05069ed8af,
title = "Towards easily reproducible nano-structured SERS substrates",
author = "Schmidt, {Michael Stenbæk} and Anja Boisen and Jörg Hübner",
note = "Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.",
year = "2009",
doi = "10.1109/ICSENS.2009.5398468",
isbn = "978-1-4244-4548-6",
pages = "1763--1767",
booktitle = "Sensors, 2009 IEEE",
publisher = "IEEE",

}

RIS

TY - GEN

T1 - Towards easily reproducible nano-structured SERS substrates

AU - Schmidt,Michael Stenbæk

AU - Boisen,Anja

AU - Hübner,Jörg

N1 - Copyright 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

PY - 2009

Y1 - 2009

N2 - In this paper we present a quick and easy method for producing relatively large areas of substrate that enhance the Raman effect, using standard semiconductor processing techniques such as reactive ion etching of silicon and electron beam metal deposition. As standard cleanroom processes are used, it is possible to narrowly control the parameters of the fabrication process to create silicon nano-pillars with controlled heights and spacing. The silicon nano-pillars are coated by thin films of silver and/or gold to create surfaces that greatly enhance the Raman effect. Surface enhanced Raman scattering (SERS) has numerous applications in chemical sensing, with high sensitivity and fast analysis speed seen as the main advantages, and these novel substrates are believed to be able to make SERS more applicable.

AB - In this paper we present a quick and easy method for producing relatively large areas of substrate that enhance the Raman effect, using standard semiconductor processing techniques such as reactive ion etching of silicon and electron beam metal deposition. As standard cleanroom processes are used, it is possible to narrowly control the parameters of the fabrication process to create silicon nano-pillars with controlled heights and spacing. The silicon nano-pillars are coated by thin films of silver and/or gold to create surfaces that greatly enhance the Raman effect. Surface enhanced Raman scattering (SERS) has numerous applications in chemical sensing, with high sensitivity and fast analysis speed seen as the main advantages, and these novel substrates are believed to be able to make SERS more applicable.

U2 - 10.1109/ICSENS.2009.5398468

DO - 10.1109/ICSENS.2009.5398468

M3 - Article in proceedings

SN - 978-1-4244-4548-6

SP - 1763

EP - 1767

BT - Sensors, 2009 IEEE

PB - IEEE

ER -