Topography characterization of a deep grating using near-field imaging

Publication: Research - peer-reviewJournal article – Annual report year: 2006

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Using near-field optical microscopy at the wavelength of 633 nm, we image light intensity distributions at several distances above an ~2-mm deep and a 1-mm-period glass grating illuminated from below under the condition of total internal reflection. The intensity distributions are numerically modeled, and an inversion procedure based on a least-squares-fit optimization is employed to extract the grating geometry from the optical images.
Original languageEnglish
JournalApplied Optics
Publication date2006
Volume45
Journal number1
Pages117-121
ISSN0003-6935
StatePublished

ID: 2418482