Topography characterization of a deep grating using near-field imaging
Publication: Research - peer-review › Journal article – Annual report year: 2006
Using near-field optical microscopy at the wavelength of 633 nm, we image light intensity distributions at several distances above an ~2-mm deep and a 1-mm-period glass grating illuminated from below under the condition of total internal reflection. The intensity distributions are numerically modeled, and an inversion procedure based on a least-squares-fit optimization is employed to extract the grating geometry from the optical images.
| Original language | English |
|---|---|
| Journal | Applied Optics |
| Publication date | 2006 |
| Volume | 45 |
| Journal number | 1 |
| Pages | 117-121 |
| ISSN | 0003-6935 |
| State | Published |
ID: 2418482