Thermoplastic microcantilevers fabricated by nanoimprint lithography
Publication: Research - peer-review › Journal article – Annual report year: 2010
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Thermoplastic microcantilevers fabricated by nanoimprint lithography. / Greve, Anders; Keller, Stephan Urs; Vig, Asger Laurberg; Kristensen, Anders; Larsson, David; Yvind, Kresten; Hvam, Jørn Märcher; Cerruti, Marta; Majumdar, Arunava; Boisen, Anja.
In: Journal of Micromechanics and Microengineering, Vol. 20, No. 1, 2010, p. 15009.Publication: Research - peer-review › Journal article – Annual report year: 2010
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TY - JOUR
T1 - Thermoplastic microcantilevers fabricated by nanoimprint lithography
AU - Greve,Anders
AU - Keller,Stephan Urs
AU - Vig,Asger Laurberg
AU - Kristensen,Anders
AU - Larsson,David
AU - Yvind,Kresten
AU - Hvam,Jørn Märcher
AU - Cerruti,Marta
AU - Majumdar,Arunava
AU - Boisen,Anja
PY - 2010
Y1 - 2010
N2 - Nanoimprint lithography has been exploited to fabricate micrometre-sized cantilevers in thermoplastic. This technique allows for very well defined microcantilevers and gives the possibility of embedding structures into the cantilever surface. The microcantilevers are fabricated in TOPAS and are up to 500 μm long, 100 μm wide, and 4.5 μm thick. Some of the cantilevers have built-in ripple surface structures with heights of 800 nm and pitches of 4 μm. The yield for the cantilever fabrication is 95% and the initial out-of-plane bending is below 10 μm. The stiffness of the cantilevers is measured by deflecting the cantilever with a well-characterized AFM probe. An average stiffness of 61.3 mN m−1 is found. Preliminary tests with water vapour indicate that the microcantilevers can be used directly for vapour sensing applications and illustrate the influence of surface structuring of the cantilevers.
AB - Nanoimprint lithography has been exploited to fabricate micrometre-sized cantilevers in thermoplastic. This technique allows for very well defined microcantilevers and gives the possibility of embedding structures into the cantilever surface. The microcantilevers are fabricated in TOPAS and are up to 500 μm long, 100 μm wide, and 4.5 μm thick. Some of the cantilevers have built-in ripple surface structures with heights of 800 nm and pitches of 4 μm. The yield for the cantilever fabrication is 95% and the initial out-of-plane bending is below 10 μm. The stiffness of the cantilevers is measured by deflecting the cantilever with a well-characterized AFM probe. An average stiffness of 61.3 mN m−1 is found. Preliminary tests with water vapour indicate that the microcantilevers can be used directly for vapour sensing applications and illustrate the influence of surface structuring of the cantilevers.
KW - DRY RELEASE
U2 - 10.1088/0960-1317/20/1/015009
DO - 10.1088/0960-1317/20/1/015009
M3 - Journal article
VL - 20
SP - 15009
JO - Journal of Micromechanics and Microengineering
T2 - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 1
ER -