Thermoplastic microcantilevers fabricated by nanoimprint lithography

Publication: Research - peer-reviewJournal article – Annual report year: 2010

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@article{9f7bb7a5a86b49839607bd9d93f88a9e,
title = "Thermoplastic microcantilevers fabricated by nanoimprint lithography",
keywords = "DRY RELEASE",
publisher = "Institute of Physics Publishing",
author = "Anders Greve and Keller, {Stephan Urs} and Vig, {Asger Laurberg} and Anders Kristensen and David Larsson and Kresten Yvind and Hvam, {Jørn Märcher} and Marta Cerruti and Arunava Majumdar and Anja Boisen",
year = "2010",
doi = "10.1088/0960-1317/20/1/015009",
volume = "20",
number = "1",
pages = "15009",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",

}

RIS

TY - JOUR

T1 - Thermoplastic microcantilevers fabricated by nanoimprint lithography

A1 - Greve,Anders

A1 - Keller,Stephan Urs

A1 - Vig,Asger Laurberg

A1 - Kristensen,Anders

A1 - Larsson,David

A1 - Yvind,Kresten

A1 - Hvam,Jørn Märcher

A1 - Cerruti,Marta

A1 - Majumdar,Arunava

A1 - Boisen,Anja

AU - Greve,Anders

AU - Keller,Stephan Urs

AU - Vig,Asger Laurberg

AU - Kristensen,Anders

AU - Larsson,David

AU - Yvind,Kresten

AU - Hvam,Jørn Märcher

AU - Cerruti,Marta

AU - Majumdar,Arunava

AU - Boisen,Anja

PB - Institute of Physics Publishing

PY - 2010

Y1 - 2010

N2 - Nanoimprint lithography has been exploited to fabricate micrometre-sized cantilevers in thermoplastic. This technique allows for very well defined microcantilevers and gives the possibility of embedding structures into the cantilever surface. The microcantilevers are fabricated in TOPAS and are up to 500 μm long, 100 μm wide, and 4.5 μm thick. Some of the cantilevers have built-in ripple surface structures with heights of 800 nm and pitches of 4 μm. The yield for the cantilever fabrication is 95% and the initial out-of-plane bending is below 10 μm. The stiffness of the cantilevers is measured by deflecting the cantilever with a well-characterized AFM probe. An average stiffness of 61.3 mN m−1 is found. Preliminary tests with water vapour indicate that the microcantilevers can be used directly for vapour sensing applications and illustrate the influence of surface structuring of the cantilevers.

AB - Nanoimprint lithography has been exploited to fabricate micrometre-sized cantilevers in thermoplastic. This technique allows for very well defined microcantilevers and gives the possibility of embedding structures into the cantilever surface. The microcantilevers are fabricated in TOPAS and are up to 500 μm long, 100 μm wide, and 4.5 μm thick. Some of the cantilevers have built-in ripple surface structures with heights of 800 nm and pitches of 4 μm. The yield for the cantilever fabrication is 95% and the initial out-of-plane bending is below 10 μm. The stiffness of the cantilevers is measured by deflecting the cantilever with a well-characterized AFM probe. An average stiffness of 61.3 mN m−1 is found. Preliminary tests with water vapour indicate that the microcantilevers can be used directly for vapour sensing applications and illustrate the influence of surface structuring of the cantilevers.

KW - DRY RELEASE

UR - http://www.iop.org/EJ/abstract/0960-1317/20/1/015009/

U2 - 10.1088/0960-1317/20/1/015009

DO - 10.1088/0960-1317/20/1/015009

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 1

VL - 20

SP - 15009

ER -