System-Level Modelling and Simulation of MEMS-Based Sensors

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2005



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The growing complexity of MEMS devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for MEMS design as well as the development of techniques for system-level modeling of these devices so that a seamless integration with the existing embedded system design methodologies is possible. In this paper, we present a MEMS design methodology that uses VHDL-AMS based system-level model of a MEMS device as a starting point and combines the top-down and bottom-up design approaches for design, verification, and optimization. The capabilities of our proposed design methodology are illustrated through the design of a microaccelerometer.
Original languageEnglish
Title of host publication9th IEEE International Multi-Topic Conference (INMIC)
Publication date2005
ISBN (print)0-7803-9429-1
StatePublished - 2005
Event9th IEEE International Multi Topic Conference - Karachi, Pakistan, December 23-25, 2005


Conference9th IEEE International Multi Topic Conference
CityKarachi, Pakistan, December 23-25, 2005
Period01/01/2005 → …

Bibliographical note

Copyright: 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

CitationsWeb of Science® Times Cited: No match on DOI


  • VHDL-AMS, Reduced-Order Model, Sensors, MEMS, SystemC, ystem-Level Model, Microaccelerometer, Wireless Sensor Networks
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