Surface Nano Structures Manufacture Using Batch Chemical Processing Methods for Tooling Applications

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2011

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The patterning of large surface areas with nano structures by using chemical batch processes to avoid using highenergy intensive nano machining processes was investigated. The capability of different surface treatment methods of creating micro and nano structured adaptable mould inserts for subsequent polymer replication by injection moulding was analyzed. New tooling solutions to produce nano structured mould surfaces were investigated. Experiments based on three different chemical-based-batch techniques to establish surface nano (i.e. sub-μm) structures on large areas were performed. Three approaches were selected: (1) using Ø500 nm nano beads deposition for direct patterning of a 4” silicon wafer; (2) using Ø500 nm nano beads deposition as mask for 4” silicon wafer etching and subsequent nickel electroplating; (3) using the anodizing process to produce Ø500 nm structures on a 30x80 mm2 aluminium substrate, subsequent nickel electroplating and finally injection moulding.
Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Multi-Material Micro Manufacture
PublisherResearch Publishing Services
Publication date2011
Pages297-301
ISBN (print)978-981-07-0319-6
DOIs
StatePublished

Conference

Conference4M 2011 Conference
CountryGermany
CityStuttgart
Period08/11/1110/11/11
Internet addresshttp://www.4m-association.org/conference/2011
CitationsWeb of Science® Times Cited: 1

Keywords

  • Nano structures, Tooling, Surface
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