Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers

Publication: Research - peer-review › Journal article – Annual report year: 2011

DOI

From the same journal

By the same authors

  • Author: Suter, M

  • Author: Ergeneman, O

    Institute of Robotics and Intelligent Systems, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland

  • Author: Zürcher, J

    Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland

  • Author: Schmid, Silvan

    Department of Micro- and Nanotechnology, Technical University of Denmark

  • Author: Camenzind, A

  • Author: Nelson, B J

    Institute of Robotics and Intelligent Systems, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland

  • Author: Hierold, C

    Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland

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We present a photocurable polymer composite with superparamagnetic characteristics for the fabrication of microcantilevers. Uniform distribution and low particle agglomeration (

Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Publication date2011
Volume21
Journal number2
Pages025023
ISSN0960-1317
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 3

ID: 5630649

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