Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers

Publication: Research - peer-reviewJournal article – Annual report year: 2011

  • Author: Suter, M

  • Author: Ergeneman, O

    Swiss Federal Institute of Technology Zurich

  • Author: Zürcher, J

    Swiss Federal Institute of Technology Zurich

  • Author: Schmid, Silvan

    Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800, Kgs. Lyngby, Denmark

  • Author: Camenzind, A

  • Author: Nelson, B J

    Swiss Federal Institute of Technology Zurich

  • Author: Hierold, C

    Swiss Federal Institute of Technology Zurich

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We present a photocurable polymer composite with superparamagnetic characteristics for the fabrication of microcantilevers. Uniform distribution and low particle agglomeration (

Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Publication date2011
Volume21
Issue2
Pages025023
ISSN0960-1317
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 9
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