Sub-µm structured lotus surfaces manufacturing

Publication: Research - peer-reviewJournal article – Annual report year: 2009

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Sub-lm structured surfaces allow modifying the behavior of polymer films or components. Especially in micro-fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g., with gradients). In this paper we present the process chain to realize polymer sub-lm structures with minimum lateral feature size of 400 nm and up to 4 lm high.
Original languageEnglish
JournalMicrosystem Technologies
Publication date2009
Volume15
Issue8
Pages1327-1333
ISSN0946-7076
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 8
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