Sub-µm structured lotus surfaces manufacturing
Publication: Research - peer-review › Journal article – Annual report year: 2009
Sub-lm structured surfaces allow modifying the behavior of polymer films or components. Especially in micro-fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g., with gradients). In this paper we present the process chain to realize polymer sub-lm structures with minimum lateral feature size of 400 nm and up to 4 lm high.
| Original language | English |
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| Journal | Microsystem Technologies |
| Publication date | 2009 |
| Volume | 15 |
| Journal number | 8 |
| Pages | 1327-1333 |
| ISSN | 0946-7076 |
| DOIs | |
| State | Published |
| Citations | Web of Science® Times Cited: 7 |
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ID: 3997547