Structured synthesis of MEMS using evolutionary approaches

Publication: Research - peer-reviewJournal article – Annual report year: 2008

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Structured synthesis of MEMS using evolutionary approaches. / Fan, Zhun; Wang, Jiachuan; Achiche, Sofiane; Goodman, Eric; Rosenberg, Ronald.

In: Applied Soft Computing, Vol. 8, No. 1, 2008, p. 579-589.

Publication: Research - peer-reviewJournal article – Annual report year: 2008

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Author

Fan, Zhun; Wang, Jiachuan; Achiche, Sofiane; Goodman, Eric; Rosenberg, Ronald / Structured synthesis of MEMS using evolutionary approaches.

In: Applied Soft Computing, Vol. 8, No. 1, 2008, p. 579-589.

Publication: Research - peer-reviewJournal article – Annual report year: 2008

Bibtex

@article{a676a8f5ecc04b8889544126c4c7a9a8,
title = "Structured synthesis of MEMS using evolutionary approaches",
publisher = "Elsevier BV",
author = "Zhun Fan and Jiachuan Wang and Sofiane Achiche and Eric Goodman and Ronald Rosenberg",
year = "2008",
doi = "10.1016/j.asoc.2007.04.001",
volume = "8",
number = "1",
pages = "579--589",
journal = "Applied Soft Computing",
issn = "1568-4946",

}

RIS

TY - JOUR

T1 - Structured synthesis of MEMS using evolutionary approaches

A1 - Fan,Zhun

A1 - Wang,Jiachuan

A1 - Achiche,Sofiane

A1 - Goodman,Eric

A1 - Rosenberg,Ronald

AU - Fan,Zhun

AU - Wang,Jiachuan

AU - Achiche,Sofiane

AU - Goodman,Eric

AU - Rosenberg,Ronald

PB - Elsevier BV

PY - 2008

Y1 - 2008

N2 - In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped-parameter model synthesis is the first step of the MEMS synthesis process. At the system level, an approach combining bond graphs and genetic programming can lead to satisfactory design candidates as system-level models that meet the predefined behavioral specifications for designers to trade off. Then at the physical layout synthesis level, the selection of geometric parameters for component devices and other design variables is formulated as a constrained optimization problem and addressed using a constrained genetic algorithm approach. A multiple-resonator microsystem design is used to illustrate the integrated design automation idea using these evolutionary approaches.

AB - In this paper, we discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical synthesis process for MEMS. The paper first introduces the flow of a structured MEMS design process and emphasizes that system-level lumped-parameter model synthesis is the first step of the MEMS synthesis process. At the system level, an approach combining bond graphs and genetic programming can lead to satisfactory design candidates as system-level models that meet the predefined behavioral specifications for designers to trade off. Then at the physical layout synthesis level, the selection of geometric parameters for component devices and other design variables is formulated as a constrained optimization problem and addressed using a constrained genetic algorithm approach. A multiple-resonator microsystem design is used to illustrate the integrated design automation idea using these evolutionary approaches.

U2 - 10.1016/j.asoc.2007.04.001

DO - 10.1016/j.asoc.2007.04.001

JO - Applied Soft Computing

JF - Applied Soft Computing

SN - 1568-4946

IS - 1

VL - 8

SP - 579

EP - 589

ER -