Spatial characterization of nanotextured surfaces by visual color imaging

Research output: Contribution to journalJournal article – Annual report year: 2016Researchpeer-review

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Spatial characterization of nanotextured surfaces by visual color imaging. / Feidenhans'l, Nikolaj Agentoft; Murthy, Swathi; Madsen, Morten H.; Petersen, Jan C.; Taboryski, Rafael J.

In: Applied Optics, Vol. 55, No. 34, 9719, 2016.

Research output: Contribution to journalJournal article – Annual report year: 2016Researchpeer-review

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@article{1fa8129582f14f9e8a52dd2ed99aaa7a,
title = "Spatial characterization of nanotextured surfaces by visual color imaging",
abstract = "We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures. The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.",
author = "Feidenhans'l, {Nikolaj Agentoft} and Swathi Murthy and Madsen, {Morten H.} and Petersen, {Jan C.} and Taboryski, {Rafael J.}",
year = "2016",
doi = "10.1364/AO.55.009719",
language = "English",
volume = "55",
journal = "Applied Optics",
issn = "1559-128X",
publisher = "Optical Society of America",
number = "34",

}

RIS

TY - JOUR

T1 - Spatial characterization of nanotextured surfaces by visual color imaging

AU - Feidenhans'l, Nikolaj Agentoft

AU - Murthy, Swathi

AU - Madsen, Morten H.

AU - Petersen, Jan C.

AU - Taboryski, Rafael J.

PY - 2016

Y1 - 2016

N2 - We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures. The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.

AB - We present a method using an ordinary color camera to characterize nanostructures from the visual color of the structures. The method provides a macroscale overview image from which micrometer-sized regions can be analyzed independently, hereby revealing long-range spatial variations of the structures. The method is tested on injection-molded polymer line gratings, and the height and filling factor are determined with confidence intervals similar to more advanced imaging scatterometry setups.

U2 - 10.1364/AO.55.009719

DO - 10.1364/AO.55.009719

M3 - Journal article

VL - 55

JO - Applied Optics

JF - Applied Optics

SN - 1559-128X

IS - 34

M1 - 9719

ER -