Silicon waveguides produced by wafer bonding

Publication: Research - peer-review › Journal article – Annual report year: 2005

Standard

Silicon waveguides produced by wafer bonding. / Poulsen, Mette ; Jensen, Flemming ; Bunk, Oliver ; Feidenhans'l, Robert Krarup ; Breiby, Dag Werner.

In: Applied Physics Letters, Vol. 87, No. 26, 2005, p. 261904.

Publication: Research - peer-review › Journal article – Annual report year: 2005

In: Applied Physics Letters, Vol. 87, No. 26, 2005, p. 261904.

Publication: Research - peer-review › Journal article – Annual report year: 2005

Bibtex

@article{d96e289048504412a84e1a5787bb6b81,

title = "Silicon waveguides produced by wafer bonding",

publisher = "American Institute of Physics",

author = "Mette Poulsen and Flemming Jensen and Oliver Bunk and Feidenhans'l, {Robert Krarup} and Breiby, {Dag Werner}",

note = "Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.",

year = "2005",

volume = "87",

number = "26",

pages = "261904",

journal = "Applied Physics Letters",

issn = "0003-6951",

}

RIS

TY - JOUR

T1 - Silicon waveguides produced by wafer bonding

A1 - Poulsen,Mette

A1 - Jensen,Flemming

A1 - Bunk,Oliver

A1 - Feidenhans'l,Robert Krarup

A1 - Breiby,Dag Werner

AU - Poulsen,Mette

AU - Jensen,Flemming

AU - Bunk,Oliver

AU - Feidenhans'l,Robert Krarup

AU - Breiby,Dag Werner

PB - American Institute of Physics

PY - 2005

Y1 - 2005

N2 - X-ray waveguides are successfully produced employing standard silicon technology of UV photolithography and wafer bonding. Contrary to theoretical expectations for similar systems even 100 mu m broad guides of less than 80 nm height do not collapse and can be used as one dimensional waveguides to excite single guided modes at typical x-ray energies.

AB - X-ray waveguides are successfully produced employing standard silicon technology of UV photolithography and wafer bonding. Contrary to theoretical expectations for similar systems even 100 mu m broad guides of less than 80 nm height do not collapse and can be used as one dimensional waveguides to excite single guided modes at typical x-ray energies.

UR - http://link.aip.org/link/APPLAB/v87/i26/p261904/s1

U2 - 10.1063/1.2158028

DO - 10.1063/1.2158028

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 26

VL - 87

SP - 261904

ER -