Silicon waveguides produced by wafer bonding

Publication: Research - peer-reviewJournal article – Annual report year: 2005

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X-ray waveguides are successfully produced employing standard silicon technology of UV photolithography and wafer bonding. Contrary to theoretical expectations for similar systems even 100 mu m broad guides of less than 80 nm height do not collapse and can be used as one dimensional waveguides to excite single guided modes at typical x-ray energies.
Original languageEnglish
JournalApplied Physics Letters
Publication date2005
Volume87
Issue26
Pages261904
ISSN0003-6951
DOIs
StatePublished

Bibliographical note

Copyright (2005) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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