Sheath-lens probe for negative ion detection in reactive plasmas

Publication: Research - peer-reviewJournal article – Annual report year: 2004

Without internal affiliation

  • Author: Stamate, Eugen

    Unknown

  • Author: Sugai, H.

    Nagoya University, Japan

  • Author: Takai, O.

    Nagoya University, Japan

  • Author: Ohe, K.

    Department of Systems Engineering, Nagoya Institute of Technology, Japan

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A method that allows easy and inexpensive detection of negative ions is introduced. The method is based upon the electrostatic lens effect of the sheath layer evolving to a positively biased planar probe that focuses the negative charges to distinct regions on the surface. Trajectories of negative ions inside the sheath are obtained after computing the potential and electric field distribution by solving in three dimensions the nonlinear Poisson equation. The negative ions’ flux to square and disk probes is developed in Ar/SF6 and O2 plasmas. The method allows negative ion detection with sensitivity higher than that of Langmuir probes. © 2004 American Institute of Physics.
Original languageEnglish
JournalJournal of Applied Physics
Publication date2004
Volume95
Pages830-833
ISSN0021-8979
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 6
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