Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head

Publication: Research - peer-reviewJournal article – Annual report year: 2010

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In this paper, we present a novel approach for measuring the resonant frequency of cantilevers fabricated in polymeric materials. We re-designed the use of a commercial DVD-ROM pickup head and combine it with a glass-polymer substrate in order to obtain a light and portable device to measure the resonant frequency of polymer cantilevers. The use of the Pyrex-SU-8 clamping substrate allows an easy replacement of the cantilever chips and a fast alignment process to the DVD-ROM laser beam. We show measurements of thermal noise for SU-8 and TOPAS cantilevers in air and liquid environment.
Original languageEnglish
JournalMicroelectronic Engineering
Publication date2010
Volume87
Journal number5-8
Pages708-711
ISSN0167-9317
DOIs
StatePublished
CitationsWeb of Science® Times Cited: 8

Keywords

  • Cantilever-based sensing, DVD pickup head, SU-8, Chip holder, Microfabrication
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