Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head
Publication: Research - peer-review › Journal article – Annual report year: 2010
In this paper, we present a novel approach for measuring the resonant frequency of cantilevers fabricated in polymeric materials. We re-designed the use of a commercial DVD-ROM pickup head and combine it with a glass-polymer substrate in order to obtain a light and portable device to measure the resonant frequency of polymer cantilevers. The use of the Pyrex-SU-8 clamping substrate allows an easy replacement of the cantilever chips and a fast alignment process to the DVD-ROM laser beam. We show measurements of thermal noise for SU-8 and TOPAS cantilevers in air and liquid environment.
| Original language | English |
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| Journal | Microelectronic Engineering |
| Publication date | 2010 |
| Volume | 87 |
| Journal number | 5-8 |
| Pages | 708-711 |
| ISSN | 0167-9317 |
| DOIs | |
| State | Published |
| Citations | Web of Science® Times Cited: 7 |
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Keywords
- Cantilever-based sensing, DVD pickup head, SU-8, Chip holder, Microfabrication
ID: 4399730