Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2011

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We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material. It provides mechanical support but it also reduces the power output. Our device replaces the support with another layer of the piezoelectric material, and with the absence of an inactive mechanical support all of the stresses induced by the vibrations will be harvested by the active piezoelectric elements.
Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
PublisherIEEE
Publication date2011
Pages679-682
ISBN (print)978-1-4577-0157-3
DOIs
StatePublished

Conference

Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
Number16
CountryChina
CityBeijing
Period05/06/1109/06/11
Internet addresshttp://www.transducers11-beijing.org/
CitationsWeb of Science® Times Cited: No match on DOI

Keywords

  • Vibrations, Micromechanical devices, Resonant frequency, Electrodes, Energy harvesting, Thick films, Fabrication
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