Novel 3D microelectrodes and pipettes by wet and dry etching

Publication: Research - peer-reviewJournal article – Annual report year: 2012

Standard

Novel 3D microelectrodes and pipettes by wet and dry etching. / Dimaki, Maria; Vazquez, Patricia; Aimone, Alessandro; Olsen, Mark H.; Sasso, Luigi; Rodriguez-Trujillo, Romen; Svendsen, Winnie E.

In: Microelectronic Engineering, Vol. 100, 2012, p. 33-36.

Publication: Research - peer-reviewJournal article – Annual report year: 2012

Harvard

APA

CBE

MLA

Vancouver

Author

Dimaki, Maria; Vazquez, Patricia; Aimone, Alessandro; Olsen, Mark H.; Sasso, Luigi; Rodriguez-Trujillo, Romen; Svendsen, Winnie E. / Novel 3D microelectrodes and pipettes by wet and dry etching.

In: Microelectronic Engineering, Vol. 100, 2012, p. 33-36.

Publication: Research - peer-reviewJournal article – Annual report year: 2012

Bibtex

@article{2766c80013a14869830651bf70f4d546,
title = "Novel 3D microelectrodes and pipettes by wet and dry etching",
publisher = "Elsevier BV",
author = "Maria Dimaki and Patricia Vazquez and Alessandro Aimone and Olsen, {Mark H.} and Luigi Sasso and Romen Rodriguez-Trujillo and Svendsen, {Winnie E.}",
year = "2012",
doi = "10.1016/j.mee.2012.07.115",
volume = "100",
pages = "33--36",
journal = "Microelectronic Engineering",
issn = "0167-9317",

}

RIS

TY - JOUR

T1 - Novel 3D microelectrodes and pipettes by wet and dry etching

A1 - Dimaki,Maria

A1 - Vazquez,Patricia

A1 - Aimone,Alessandro

A1 - Olsen,Mark H.

A1 - Sasso,Luigi

A1 - Rodriguez-Trujillo,Romen

A1 - Svendsen,Winnie E.

AU - Dimaki,Maria

AU - Vazquez,Patricia

AU - Aimone,Alessandro

AU - Olsen,Mark H.

AU - Sasso,Luigi

AU - Rodriguez-Trujillo,Romen

AU - Svendsen,Winnie E.

PB - Elsevier BV

PY - 2012

Y1 - 2012

N2 - The purpose of this work is to develop novel 3D micro- and nanoelectrodes and pipettes by use of carefully optimised standard microfabrication techniques such as wet (by KOH) and dry silicon etching. Two types of electrodes have been fabricated and characterized: small nanoelectrodes to be used for localised measurements on cell cultures and high aspect ratio scalloped microelectrodes for measurements in brain slices. This paper presents improved fabrication processes for both types of electrodes and the pipettes, as well as the electrical and electrochemical characterization of the small electrodes in order to confirm their functionality. Although functional, an increase in the electrode surface area is needed if they are to be used for electrophysiological measurements. Finally, the pipettes fabricated have openings of the order of 500nm, which makes them ideal candidates for localised stimulation of cell or brain slice cultures.

AB - The purpose of this work is to develop novel 3D micro- and nanoelectrodes and pipettes by use of carefully optimised standard microfabrication techniques such as wet (by KOH) and dry silicon etching. Two types of electrodes have been fabricated and characterized: small nanoelectrodes to be used for localised measurements on cell cultures and high aspect ratio scalloped microelectrodes for measurements in brain slices. This paper presents improved fabrication processes for both types of electrodes and the pipettes, as well as the electrical and electrochemical characterization of the small electrodes in order to confirm their functionality. Although functional, an increase in the electrode surface area is needed if they are to be used for electrophysiological measurements. Finally, the pipettes fabricated have openings of the order of 500nm, which makes them ideal candidates for localised stimulation of cell or brain slice cultures.

KW - Micro- and nanoelectrodes

KW - Fabrication techniques

KW - Electrical characterization

KW - Electrochemical characterization

U2 - 10.1016/j.mee.2012.07.115

DO - 10.1016/j.mee.2012.07.115

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

VL - 100

SP - 33

EP - 36

ER -