Nanostructuring with Bonding and Structural Studies of Plasma Assisted Wafer Bonding

Publication: ResearchPh.D. thesis – Annual report year: 2006

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Nanostructuring with Bonding and Structural Studies of Plasma Assisted Wafer Bonding. / Poulsen, Mette; Jensen, Flemming (Supervisor); Feidenhans'l, R. (Supervisor).

2006.

Publication: ResearchPh.D. thesis – Annual report year: 2006

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Author

Poulsen, Mette; Jensen, Flemming (Supervisor); Feidenhans'l, R. (Supervisor) / Nanostructuring with Bonding and Structural Studies of Plasma Assisted Wafer Bonding.

2006.

Publication: ResearchPh.D. thesis – Annual report year: 2006

Bibtex

@book{7b50999a6dc6470fa6e84947e2d39ab5,
title = "Nanostructuring with Bonding and Structural Studies of Plasma Assisted Wafer Bonding",
author = "Mette Poulsen and Flemming Jensen and R. Feidenhans'l",
year = "2006",

}

RIS

TY - BOOK

T1 - Nanostructuring with Bonding and Structural Studies of Plasma Assisted Wafer Bonding

A1 - Poulsen,Mette

AU - Poulsen,Mette

A2 - Jensen,Flemming

A2 - Feidenhans'l,R.

ED - Jensen,Flemming

ED - Feidenhans'l,R.

PY - 2006/6

Y1 - 2006/6

BT - Nanostructuring with Bonding and Structural Studies of Plasma Assisted Wafer Bonding

ER -