Multiple height calibration artefact for 3D microscopy

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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Multiple height calibration artefact for 3D microscopy. / De Chiffre, Leonardo; Carli, Lorenzo; Eriksen, Rasmus Solmer.

In: C I R P Annals, Vol. 60, No. 1, 2011, p. 535-538.

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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Author

De Chiffre, Leonardo; Carli, Lorenzo; Eriksen, Rasmus Solmer / Multiple height calibration artefact for 3D microscopy.

In: C I R P Annals, Vol. 60, No. 1, 2011, p. 535-538.

Publication: Research - peer-reviewJournal article – Annual report year: 2011

Bibtex

@article{1dac2b9e6c994b67a24583dce12d9e16,
title = "Multiple height calibration artefact for 3D microscopy",
publisher = "Elsevier BV",
author = "{De Chiffre}, Leonardo and Lorenzo Carli and Eriksen, {Rasmus Solmer}",
year = "2011",
doi = "10.1016/j.cirp.2011.03.054",
volume = "60",
number = "1",
pages = "535--538",
journal = "C I R P Annals",
issn = "0007-8506",

}

RIS

TY - JOUR

T1 - Multiple height calibration artefact for 3D microscopy

A1 - De Chiffre,Leonardo

A1 - Carli,Lorenzo

A1 - Eriksen,Rasmus Solmer

AU - De Chiffre,Leonardo

AU - Carli,Lorenzo

AU - Eriksen,Rasmus Solmer

PB - Elsevier BV

PY - 2011

Y1 - 2011

N2 - A novel artefact for calibration of the height in 3D microscopy is presented. The artefact comprises three steps having a common vertical axis, which allows z-coordinate calibration at different magnifications without requiring repositioning. The artefact is suitable for transferring traceability to 3D techniques at the micrometer and nanometer scale, e.g. 3D SEM, confocal microscopes etc. Two different series of samples were fabricated using EDM with three steps of 2–5–7μm, and 20–50–70μm, respectively, from a 3mm diameter carbide wire. The artefact steps were calibrated on a stylus instrument according to ISO 5436 and measured on 3D microscopes.

AB - A novel artefact for calibration of the height in 3D microscopy is presented. The artefact comprises three steps having a common vertical axis, which allows z-coordinate calibration at different magnifications without requiring repositioning. The artefact is suitable for transferring traceability to 3D techniques at the micrometer and nanometer scale, e.g. 3D SEM, confocal microscopes etc. Two different series of samples were fabricated using EDM with three steps of 2–5–7μm, and 20–50–70μm, respectively, from a 3mm diameter carbide wire. The artefact steps were calibrated on a stylus instrument according to ISO 5436 and measured on 3D microscopes.

KW - 3D microscopy

KW - Metrology

KW - Calibration

U2 - 10.1016/j.cirp.2011.03.054

DO - 10.1016/j.cirp.2011.03.054

JO - C I R P Annals

JF - C I R P Annals

SN - 0007-8506

IS - 1

VL - 60

SP - 535

EP - 538

ER -