Multi Degrees of Freedom Electro-Thermal Microactuators
Publication: Research - peer-review › Article in proceedings – Annual report year: 1999
| Original language | English |
|---|---|
| Title | Proceedings of the 10th International Conference on Solid-State Sensors and Actuators |
| Publisher | The Institute of Electrical Engineers of Japan |
| Publication date | 1999 |
| Pages | 1372-1375 |
| State | Published |
Conference
| Conference | Transducers '99, 10th International Conference on Solid-State Sensors and Actuators |
|---|---|
| City | Sendai, Japan |
| Period | 01-01-99 → … |
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ID: 5389746