Multi Degrees of Freedom Electro-Thermal Microactuators

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 1999

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Original languageEnglish
TitleProceedings of the 10th International Conference on Solid-State Sensors and Actuators
PublisherThe Institute of Electrical Engineers of Japan
Publication date1999
Pages1372-1375
StatePublished

Conference

ConferenceTransducers '99, 10th International Conference on Solid-State Sensors and Actuators
CitySendai, Japan
Period01-01-99 → …

ID: 5389746