Modelling of CMUTs with Anisotropic Plates

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2012

Standard

Modelling of CMUTs with Anisotropic Plates. / la Cour, Mette Funding; Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt; Thomsen, Erik Vilain.

Proceedings of IEEE International Ultrasonics Symposium. IEEE, 2012. p. 588-591.

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2012

Harvard

la Cour, MF, Christiansen, TL, Jensen, JA & Thomsen, EV 2012, 'Modelling of CMUTs with Anisotropic Plates'. in Proceedings of IEEE International Ultrasonics Symposium. IEEE, pp. 588-591., 10.1109/ULTSYM.2012.0146

APA

la Cour, M. F., Christiansen, T. L., Jensen, J. A., & Thomsen, E. V. (2012). Modelling of CMUTs with Anisotropic Plates. In Proceedings of IEEE International Ultrasonics Symposium. (pp. 588-591). IEEE. 10.1109/ULTSYM.2012.0146

CBE

la Cour MF, Christiansen TL, Jensen JA, Thomsen EV. 2012. Modelling of CMUTs with Anisotropic Plates. In Proceedings of IEEE International Ultrasonics Symposium. IEEE. pp. 588-591. Available from: 10.1109/ULTSYM.2012.0146

MLA

la Cour, Mette Funding et al. "Modelling of CMUTs with Anisotropic Plates". Proceedings of IEEE International Ultrasonics Symposium. IEEE. 2012. 588-591. Available: 10.1109/ULTSYM.2012.0146

Vancouver

la Cour MF, Christiansen TL, Jensen JA, Thomsen EV. Modelling of CMUTs with Anisotropic Plates. In Proceedings of IEEE International Ultrasonics Symposium. IEEE. 2012. p. 588-591. Available from: 10.1109/ULTSYM.2012.0146

Author

la Cour, Mette Funding; Christiansen, Thomas Lehrmann; Jensen, Jørgen Arendt; Thomsen, Erik Vilain / Modelling of CMUTs with Anisotropic Plates.

Proceedings of IEEE International Ultrasonics Symposium. IEEE, 2012. p. 588-591.

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2012

Bibtex

@inbook{f75322ea6b244faab3783221ddf55c26,
title = "Modelling of CMUTs with Anisotropic Plates",
keywords = "Analytical models, Equations, Finite element analysis, Integrated circuit modeling, Mathematical model, Resonant frequency, Silicon",
publisher = "IEEE",
author = "{la Cour}, {Mette Funding} and Christiansen, {Thomas Lehrmann} and Jensen, {Jørgen Arendt} and Thomsen, {Erik Vilain}",
year = "2012",
doi = "10.1109/ULTSYM.2012.0146",
isbn = "9781467345613",
pages = "588-591",
booktitle = "Proceedings of IEEE International Ultrasonics Symposium",

}

RIS

TY - GEN

T1 - Modelling of CMUTs with Anisotropic Plates

A1 - la Cour,Mette Funding

A1 - Christiansen,Thomas Lehrmann

A1 - Jensen,Jørgen Arendt

A1 - Thomsen,Erik Vilain

AU - la Cour,Mette Funding

AU - Christiansen,Thomas Lehrmann

AU - Jensen,Jørgen Arendt

AU - Thomsen,Erik Vilain

PB - IEEE

PY - 2012

Y1 - 2012

N2 - Traditionally, CMUTs are modelled using the isotropic plate equation and this leads to deviations between analytical calculations and FEM simulations. In this paper, the deflection profile and material parameters are calculated using the anisotropic plate equation. It is shown that the anisotropic calculations<br/>match perfectly with FEM while an isotropic approach causes up to 10% deviations in deflection profile. Furthermore, we show how commonly used analytic modelling methods such as static calculations of the pull-in voltage and dynamic modelling through an equivalent circuit representation can be adjusted to<br/>include the correct anisotropic behaviour by using an effective flexural rigidity. The anisotropic caluclations are also compared to experimental data from actual CMUTs showing an error of maximum 3%.

AB - Traditionally, CMUTs are modelled using the isotropic plate equation and this leads to deviations between analytical calculations and FEM simulations. In this paper, the deflection profile and material parameters are calculated using the anisotropic plate equation. It is shown that the anisotropic calculations<br/>match perfectly with FEM while an isotropic approach causes up to 10% deviations in deflection profile. Furthermore, we show how commonly used analytic modelling methods such as static calculations of the pull-in voltage and dynamic modelling through an equivalent circuit representation can be adjusted to<br/>include the correct anisotropic behaviour by using an effective flexural rigidity. The anisotropic caluclations are also compared to experimental data from actual CMUTs showing an error of maximum 3%.

KW - Analytical models

KW - Equations

KW - Finite element analysis

KW - Integrated circuit modeling

KW - Mathematical model

KW - Resonant frequency

KW - Silicon

U2 - 10.1109/ULTSYM.2012.0146

DO - 10.1109/ULTSYM.2012.0146

SN - 9781467345613

BT - Proceedings of IEEE International Ultrasonics Symposium

T2 - Proceedings of IEEE International Ultrasonics Symposium

SP - 588

EP - 591

ER -