Micro-uniformity during laser anneal : metrology and physics

Publication: Research - peer-review › Article in proceedings – Annual report year: 2008

Standard

Micro-uniformity during laser anneal : metrology and physics. / Vandervorst, W.; Rosseel, E.; Lin, Rong; Petersen, Dirch Hjorth; Clarysse, T.; Goossens, J.; Nielsen, P.F.

In: Proceedings of Materials Research Society: Doping Engineering for Front-End Processing. Vol. 1070 Materials Research Society, 2008.

Publication: Research - peer-review › Article in proceedings – Annual report year: 2008

Harvard

Vandervorst, W, Rosseel, E, Lin, R, Petersen, DH, Clarysse, T, Goossens, J & Nielsen, PF 2008, 'Micro-uniformity during laser anneal : metrology and physics'. in: Proceedings of Materials Research Society: Doping Engineering for Front-End Processing. vol. 1070, Materials Research Society.

APA

Vandervorst, W., Rosseel, E., Lin, R., Petersen, D. H., Clarysse, T., Goossens, J., & Nielsen, P. F. (2008). Micro-uniformity during laser anneal : metrology and physics. In: Proceedings of Materials Research Society: Doping Engineering for Front-End Processing. Materials Research Society.

CBE

Vandervorst W, Rosseel E, Lin R, Petersen DH, Clarysse T, Goossens J, Nielsen PF. 2008. Micro-uniformity during laser anneal : metrology and physics. In Proceedings of Materials Research Society: Doping Engineering for Front-End Processing. Materials Research Society.

MLA

Vandervorst, W. et al. "Micro-uniformity during laser anneal : metrology and physics". In: Proceedings of Materials Research Society: Doping Engineering for Front-End Processing. Materials Research Society. 2008.

Vancouver

Vandervorst W, Rosseel E, Lin R, Petersen DH, Clarysse T, Goossens J et al. Micro-uniformity during laser anneal : metrology and physics. In: Proceedings of Materials Research Society: Doping Engineering for Front-End Processing. Materials Research Society. 2008.

Author

Vandervorst, W.; Rosseel, E.; Lin, Rong; Petersen, Dirch Hjorth; Clarysse, T.; Goossens, J.; Nielsen, P.F. / Micro-uniformity during laser anneal : metrology and physics.

In: Proceedings of Materials Research Society: Doping Engineering for Front-End Processing. Vol. 1070 Materials Research Society, 2008.

Publication: Research - peer-review › Article in proceedings – Annual report year: 2008

Bibtex

@inbook{b782a3edcaaf40698b563f4ba664921f,

title = "Micro-uniformity during laser anneal : metrology and physics",

publisher = "Materials Research Society",

author = "W. Vandervorst and E. Rosseel and Rong Lin and Petersen, {Dirch Hjorth} and T. Clarysse and J. Goossens and P.F. Nielsen",

year = "2008",

volume = "1070",

isbn = "978-1-60511-040-0",

booktitle = "Proceedings of Materials Research Society",

}

RIS

TY - GEN

T1 - Micro-uniformity during laser anneal : metrology and physics

A1 - Vandervorst,W.

A1 - Rosseel,E.

A1 - Lin,Rong

A1 - Petersen,Dirch Hjorth

A1 - Clarysse,T.

A1 - Goossens,J.

A1 - Nielsen,P.F.

AU - Vandervorst,W.

AU - Rosseel,E.

AU - Lin,Rong

AU - Petersen,Dirch Hjorth

AU - Clarysse,T.

AU - Goossens,J.

AU - Nielsen,P.F.

PB - Materials Research Society

PY - 2008

Y1 - 2008

SN - 978-1-60511-040-0

VL - 1070

BT - Proceedings of Materials Research Society

T2 - Proceedings of Materials Research Society

ER -