Micro-cantilevers for non-destructive characterization of nanograss uniformity

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2011

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We demonstrate an application of three-way flexible micro four-point probes for indirect uniformity characterization of surface morphology. The mean sheet conductance of a quasi-planar 3D nanostructured surface is highly dependent on the surface morphology, and thus accurate sheet conductance measurements may be useful for process uniformity characterization. The method is applied for characterization of TiW coated nanograss uniformity. Three-way flexible L-shaped cantilever electrodes are used to avoid damage to the fragile surface, and a relative standard deviation on measurement repeatability of 0.12 % is obtained with a measurement yield of 97%. Finally, variations in measured sheet conductance are correlated to the surface morphology as characterized by electron microscopy.
Original languageEnglish
Title16th International Solid-State Sensors, Actuators and Microsystems Conference
PublisherIEEE
Publication date2011
ISBN (print)978-1-4577-0157-3
DOIs
StatePublished

Conference

Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
Number16
CountryChina
CityBeijing
Period05/06/1109/06/11
Internet addresshttp://www.transducers11-beijing.org/
CitationsWeb of Science® Times Cited: No match on DOI

Keywords

  • Sensitivity, Surface treatment, Surface morphology, Morphology, Electrodes, Probes, Contacts
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