Micro Four-Point Probe and Micro Hall Effect

Micro Four-Point Probe and Micro Hall Effect : Methods for Reliable Electrical Characterization of Ultra-Shallow Junctions

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Author: Petersen, Dirch Hjorth
Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800, Kgs. Lyngby
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Supervisor: Bøggild, Peter
Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800, Kgs. Lyngby
Email:
Supervisor: Hansen, Ole
Experimental surface - and nanomaterials physics, Department of Physics, Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800 , Kgs. Lyngby
Email:
Supervisor: Nielsen, Peter F.
Capres A/S
Supervisor: Vandervorst , Wilfried
IMEC

Original language	English
Publication date	2012

Number of pages	64
State	Published

No data available

ID: 7831933