Micro cutting and forming of thin aluminium foils

Publication: Research - peer-review › Article in proceedings – Annual report year: 2010

Author: Damsgaard, Christian Danvad
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800, Kgs. Lyngby
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Author: Mortensen, Dennis
Department of Micro- and Nanotechnology, Technical University of Denmark, ØrstedsPlads 344, 2800, Kgs. Lyngby
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Author: Rombach, Pirmin
Department of Micro- and Nanotechnology, Technical University of Denmark
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Author: Hansen, Ole
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark, Ørsteds Plads, 2800 , Kgs. Lyngby
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Original language	English
Title	The 5th international conference on MicroManufacturing ICOMM/4M
Publication date	2010
Pages	173-178
State	Published

Conference	5th International Conference on MicroManufacturing
Number	5
Country	United States
City	Madison, WI
Period	05-04-10 → 08-04-10
Internet address	http://www.conferencing.uwex.edu/conferences/ICOMM10/

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ID: 4347572

Crystallographic dependence of the lateral undercut wet etch rate of Al0.5In0.5P in diluted HCl for III-V sacrificial release