Method and device for nanoimprint lithography

Publication: ResearchPatent – Annual report year: 2011

Standard

Method and device for nanoimprint lithography. / Smistrup, Kristian (Inventor); Hedegaard, Tobias (Inventor); Hansen, Ole (Inventor).

Patent No.: WO 2011050817. May 05, 2011.

Publication: ResearchPatent – Annual report year: 2011

Harvard

Smistrup, K, Hedegaard, T & Hansen, O May. 05 2011, Method and device for nanoimprint lithography, Patent No. WO 2011050817.

APA

Smistrup, K., Hedegaard, T., & Hansen, O. (2011). Patent No. WO 2011050817.

CBE

Smistrup K, Hedegaard T, Hansen O, inventors. 05-May-2011. Method and device for nanoimprint lithography. Patent No. WO 2011050817.

MLA

Smistrup, Kristian, Tobias Hedegaard and Ole Hansen, . 2011. Patent No. WO 2011050817.

Vancouver

Smistrup K, Hedegaard T, Hansen O, inventors. Method and device for nanoimprint lithography. Patent No. WO 2011050817. May 05, 2011.

Author

Smistrup, Kristian (Inventor); Hedegaard, Tobias (Inventor); Hansen, Ole (Inventor) / Method and device for nanoimprint lithography.

Patent No.: WO 2011050817. May 05, 2011.

Publication: ResearchPatent – Annual report year: 2011

Bibtex

@misc{4d1709e821d6495f9e04bdd92dd922ee,
title = "Method and device for nanoimprint lithography",
author = "Kristian Smistrup and Tobias Hedegaard and Ole Hansen",
year = "2011",
type = "Patent <importModel: PatentImportModel>",

}

RIS

TY - PAT

T1 - Method and device for nanoimprint lithography

AU - Smistrup,Kristian

AU - Hedegaard,Tobias

AU - Hansen,Ole

N1 - Francaise: Procede et dispositif pour lithographie a nano-impression

PY - 2011

Y1 - 2011

M3 - Patent

M1 - WO 2011050817

Y2 - 2011/05/05

ER -