Method and device for nanoimprint lithography

Publication: ResearchPatent – Annual report year: 2011

Standard

Method and device for nanoimprint lithography. / Smistrup, Kristian (Inventor); Hedegaard, Tobias (Inventor); Hansen, Ole (Inventor).

Patent No.: WO 2011050817. May 05, 2011.

Publication: ResearchPatent – Annual report year: 2011

Harvard

APA

Smistrup, K., Hedegaard, T., & Hansen, O. (2011). WO 2011050817.

CBE

Smistrup K, Hedegaard T, Hansen O, inventors. 05-May-2011. Method and device for nanoimprint lithography. WO 2011050817.

MLA

Vancouver

Smistrup K, Hedegaard T, Hansen O, inventors. Method and device for nanoimprint lithography. WO 2011050817. May 05, 2011.

Author

Smistrup, Kristian (Inventor); Hedegaard, Tobias (Inventor); Hansen, Ole (Inventor) / Method and device for nanoimprint lithography.

Patent No.: WO 2011050817. May 05, 2011.

Publication: ResearchPatent – Annual report year: 2011

Bibtex

@misc{4d1709e821d6495f9e04bdd92dd922ee,
title = "Method and device for nanoimprint lithography",
author = "Kristian Smistrup and Tobias Hedegaard and Ole Hansen",
year = "2011",
type = "Patent <importModel: PatentImportModel>",

}

RIS

TY - PAT

T1 - Method and device for nanoimprint lithography

A1 - Smistrup,Kristian

A1 - Hedegaard,Tobias

A1 - Hansen,Ole

AU - Smistrup,Kristian

AU - Hedegaard,Tobias

AU - Hansen,Ole

PY - 2011

Y1 - 2011

M1 - WO 2011050817

Y2 - 2011/05/05

ER -