Method and device for nanoimprint lithography

Publication: ResearchPatent – Annual report year: 2011

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Original languageEnglish
Publication date2011
Patent numberWO 2011050817
Date05/05/11
CountryInternational Bureau of the World Intellectual Property Organization (WIPO)
StatePublished

Bibliographical note

Francaise: Procede et dispositif pour lithographie a nano-impression

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