Method and device for nanoimprint lithography
Publication: Research › Patent – Annual report year: 2011
| Original language | English |
|---|---|
| Publication date | 2011 |
| Patent number | WO 2011050817 |
| Date | 05-05-11 |
| Country | International Bureau of the World Intellectual Property Organization (WIPO) |
| State | Published |
Bibliographical note
Francaise: Procede et dispositif pour lithographie a nano-impression
ID: 6446048