Publication: Research - peer-review › Article in proceedings – Annual report year: 2011
We present a MEMS-based unimorph silicon/PZT thick film vibrational energy harvester with an integrated proof mass. We have developed a process that allows fabrication of high performance silicon based energy harvesters with a yield higher than 90%. The process comprises a KOH etch using a mechanical front side protection of an SOI wafer with screen printed PZT thick film. The fabricated harvester device produces 14.0 μW with an optimal resistive load of 100 kΩ from 1g (g=9.81 m s-2) input acceleration at its resonant frequency of 235 Hz.
|Title||Micro Electro Mechanical Systems (MEMS)|
|Conference||24th International Conference on Micro Electro Mechanical Systems|
|Period||23-01-11 → 27-01-11|
|Citations||Web of Science® Times Cited: No match on DOI|
- Micromechanical devices, Silicon, Silicon-on-insulator, Lead compounds, Energy harvesting, Thick film devices, Etching, Microfabrication
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