Measurement capability overview in PolyNano: Final

Publication: ResearchReport – Annual report year: 2012

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A measurement capability overview has been conducted to evaluate, among the most used instruments in the field of nanometrology, where the PolyNano project should focus its research.
The deliverable presents the most relevant instruments to achieve the best possible measurements accuracy matching requirements such as low uncertainty, high repeatability and resolution, adequate measuring range and availability among the different project partners.
Based on the present measurement capability overview and in relation to the objective of PolyNano to “remove the technology barrier between lab‐scale proof of principle and high volume low cost production”, WP6 future work will be on standardizing new measuring methods through traceable procedures which will enable product quality control implemented in‐line with micro/nano manufacturing processing technologies.
Original languageEnglish
Publication date2012
Number of pages16
NameTechnical Report of DSF (Danish Council for Strategic Research) Project PolyNano
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ID: 12218458