Lateral boron distribution in polycrystalline SiC source for growth of fluorescent 6H-SiC

Publication: Research - peer-reviewConference abstract for conference – Annual report year: 2012

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Original languageEnglish
Publication date2012
Number of pages2
StatePublished

Conference

ConferenceEuropean Conference on Silicon Carbide and Related Materials (ECSCRM 2012)
CountryRussian Federation
CitySaint-Petersburg
Period02/09/1206/09/12
Internet addresshttps://www.ecscrm-2012.org/
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