Large area negative ion source based on matrix ECR cells for fast silicon etching
Publication: Research - peer-review › Conference abstract in proceedings – Annual report year: 2009
| Original language | English |
|---|---|
| Title | Proceedings |
| Publication date | 2009 |
| Pages | 49-50 |
| State | Published |
Conference
| Conference | 31st International Symposium on Dry Process |
|---|---|
| Country | South Korea |
| City | Busan |
| Period | 24-09-09 → 25-09-09 |
| Internet address | http://www.plasma.engg.nagoya-u.ac.jp/dps2009/ |
Keywords
- Plasma processing, Fusion energy
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