Improved anti-stiction coating of SU-8 molds
Publication: Research - peer-review › Journal article – Annual report year: 2010
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Improved anti-stiction coating of SU-8 molds. / Lange, Jacob Moresco; Clausen, Casper Hyttel; Svendsen, Winnie Edith.
In: Sensors and Actuators B: Chemical, Vol. 145, No. 2, 2010, p. 698-701.Publication: Research - peer-review › Journal article – Annual report year: 2010
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TY - JOUR
T1 - Improved anti-stiction coating of SU-8 molds
A1 - Lange,Jacob Moresco
A1 - Clausen,Casper Hyttel
A1 - Svendsen,Winnie Edith
AU - Lange,Jacob Moresco
AU - Clausen,Casper Hyttel
AU - Svendsen,Winnie Edith
PB - Elsevier S.A.
PY - 2010
Y1 - 2010
N2 - We have developed a simple method for the improved release of embossed poly(methyl methacrylate) (PMMA) as well as casted poly(dimethyl siloxane) (PDMS) from a SU-8 mold using vapor phase deposition of 1H,1H,2H,2H-Perfluorodecyltrichlorosilane (FDTS). We have further investigated if prior breakage of the epoxy groups by oxygen plasma or sulfuric acid improves the deposition of FDTS. The deposition of FDTS on acid-activated and untreated SU-8 gave an identical well performing anti-stiction coating, as opposed to oxygen plasma activated surface which resulted in a poor FDTS coverage. In this paper the method for the mold fabrication as well as the vapor phase deposition of FDTS onto the mold is described; examples of released final devices using this method in PMMA and PDMS are presented. (C) 2010 Elsevier B.V. All rights reserved.
AB - We have developed a simple method for the improved release of embossed poly(methyl methacrylate) (PMMA) as well as casted poly(dimethyl siloxane) (PDMS) from a SU-8 mold using vapor phase deposition of 1H,1H,2H,2H-Perfluorodecyltrichlorosilane (FDTS). We have further investigated if prior breakage of the epoxy groups by oxygen plasma or sulfuric acid improves the deposition of FDTS. The deposition of FDTS on acid-activated and untreated SU-8 gave an identical well performing anti-stiction coating, as opposed to oxygen plasma activated surface which resulted in a poor FDTS coverage. In this paper the method for the mold fabrication as well as the vapor phase deposition of FDTS onto the mold is described; examples of released final devices using this method in PMMA and PDMS are presented. (C) 2010 Elsevier B.V. All rights reserved.
U2 - 10.1016/j.snb.2010.01.020
DO - 10.1016/j.snb.2010.01.020
JO - Sensors and Actuators B: Chemical
JF - Sensors and Actuators B: Chemical
SN - 0925-4005
IS - 2
VL - 145
SP - 698
EP - 701
ER -