Improved anti-stiction coating of SU-8 molds

Publication: Research - peer-reviewJournal article – Annual report year: 2010

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Improved anti-stiction coating of SU-8 molds. / Lange, Jacob Moresco; Clausen, Casper Hyttel; Svendsen, Winnie Edith.

In: Sensors and Actuators B: Chemical, Vol. 145, No. 2, 2010, p. 698-701.

Publication: Research - peer-reviewJournal article – Annual report year: 2010

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Author

Lange, Jacob Moresco; Clausen, Casper Hyttel; Svendsen, Winnie Edith / Improved anti-stiction coating of SU-8 molds.

In: Sensors and Actuators B: Chemical, Vol. 145, No. 2, 2010, p. 698-701.

Publication: Research - peer-reviewJournal article – Annual report year: 2010

Bibtex

@article{7845bd8e5f8848c5aa0b332b8205291c,
title = "Improved anti-stiction coating of SU-8 molds",
publisher = "Elsevier S.A.",
author = "Lange, {Jacob Moresco} and Clausen, {Casper Hyttel} and Svendsen, {Winnie Edith}",
year = "2010",
doi = "10.1016/j.snb.2010.01.020",
volume = "145",
number = "2",
pages = "698--701",
journal = "Sensors and Actuators B: Chemical",
issn = "0925-4005",

}

RIS

TY - JOUR

T1 - Improved anti-stiction coating of SU-8 molds

A1 - Lange,Jacob Moresco

A1 - Clausen,Casper Hyttel

A1 - Svendsen,Winnie Edith

AU - Lange,Jacob Moresco

AU - Clausen,Casper Hyttel

AU - Svendsen,Winnie Edith

PB - Elsevier S.A.

PY - 2010

Y1 - 2010

N2 - We have developed a simple method for the improved release of embossed poly(methyl methacrylate) (PMMA) as well as casted poly(dimethyl siloxane) (PDMS) from a SU-8 mold using vapor phase deposition of 1H,1H,2H,2H-Perfluorodecyltrichlorosilane (FDTS). We have further investigated if prior breakage of the epoxy groups by oxygen plasma or sulfuric acid improves the deposition of FDTS. The deposition of FDTS on acid-activated and untreated SU-8 gave an identical well performing anti-stiction coating, as opposed to oxygen plasma activated surface which resulted in a poor FDTS coverage. In this paper the method for the mold fabrication as well as the vapor phase deposition of FDTS onto the mold is described; examples of released final devices using this method in PMMA and PDMS are presented. (C) 2010 Elsevier B.V. All rights reserved.

AB - We have developed a simple method for the improved release of embossed poly(methyl methacrylate) (PMMA) as well as casted poly(dimethyl siloxane) (PDMS) from a SU-8 mold using vapor phase deposition of 1H,1H,2H,2H-Perfluorodecyltrichlorosilane (FDTS). We have further investigated if prior breakage of the epoxy groups by oxygen plasma or sulfuric acid improves the deposition of FDTS. The deposition of FDTS on acid-activated and untreated SU-8 gave an identical well performing anti-stiction coating, as opposed to oxygen plasma activated surface which resulted in a poor FDTS coverage. In this paper the method for the mold fabrication as well as the vapor phase deposition of FDTS onto the mold is described; examples of released final devices using this method in PMMA and PDMS are presented. (C) 2010 Elsevier B.V. All rights reserved.

U2 - 10.1016/j.snb.2010.01.020

DO - 10.1016/j.snb.2010.01.020

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

SN - 0925-4005

IS - 2

VL - 145

SP - 698

EP - 701

ER -