Hot embossing of photonic crystal polymer structures with a high aspect ratio

Publication: Research - peer-reviewJournal article – Annual report year: 2011

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Hot embossing is a promising approach for mass production of photonic crystal structures. This paper describes the fabrication of a replication tool for two-dimensional photonic crystal patterns and its replication in substrates of poly(methylmethacrylate) (PMMA) and cyclic olefin copolymer (COC). A nickel tool for the replication of structures with lateral dimensions of 110 nm and heights of approximately 370 nm is fabricated via electroplating of a nanostructured sample resulting in an aspect ratio of approximately 3.5. The structures are subsequently hot embossed into PMMA and COC substrates.

Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number2
Pages (from-to)025017
ISSN09601317
DOIs
StatePublished - 2011
Peer-reviewedYes
CitationsWeb of Science® Times Cited: 3

Keywords

  • Electrodeposition, electroplating, Photonic bandgap materials, Polymers, elastomers, and plastics, Structure of nanoscale materials
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