Hollow core MOEMS Bragg grating microphone for distributed and remote sensing

Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2011

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We present the design and fabrication of a completely new high sensitivity all-optical frequency modulated MOEMS microphone for distributed and remote sensing applications. Due to immunity to electromagnetic interference, no parasitic capacitances and easy wavelength division multiplexing (WDM) combined with the low transmission loss of modern optical fibers [1], frequency modulated optical sensors are ideal for remote and distributed sensing. While several all-optical and high sensitivity MOEMS pressure sensors are found in literature, these sensors are typically based on amplitude (intensity) modulation. Amplitude modulation is inherently sensitive to transmission loss and requires a unique transmission line for each sensor. Though fiber Bragg gratings (FBGs) are based on frequency modulation the relatively large dimensions of optical fibers and their low refractive index modulation makes them most suitable for high stress sensing, e.g. in structural health monitoring. The MOEMS microphone presented here has a calculated static pressure sensitivity approximately 104 times larger than conventional FBGs [2,3].
Original languageEnglish
TitleTRANSDUCERS 2011 : 16th International Solid-State Sensors, Actuators and Microsystems Conference
PublisherIEEE
Publication date2011
PagesM3P.143
ISBN (print)978-1-4577-0157-3
DOIs
StatePublished

Conference

Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
Number16
CountryChina
CityBeijing
Period05/06/1109/06/11
Internet addresshttp://www.transducers11-beijing.org/
CitationsWeb of Science® Times Cited: No match on DOI

Keywords

  • Optical waveguides, Bragg gratings, Optical fiber sensors, Temperature sensors, Refractive index
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